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Nanjing ChiShun Tech Dev Co., Ltd
Location:Products > Furnace > CVD Tube Furnace
Name: TF1400 CVD Tube Furnace
Model: TF1400
Introduction:

1400°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or
nanomaterials.

堅固耐用可通氣體
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1400°C Tube Furnace Chemical Vapor Deposition (CVD) refers to the method of chemical gas or steam reacting on the surface of the substrate to synthesize coatings or
nanomaterials. It is the most widely used technology in the semiconductor industry to deposit a variety of materials, including a wide range of insulating materials,

most metallic materials and metal alloy materials.


Furnace shell

The shell is made of metal Q235 low-carbon steel, and the surface is electrostatically resistant and resistant to corrosion.

The solid double-layer metal frame is combined with the heat-insulating fan structure, and the furnace surface temperature is low

Horizontal use mode, upper opening structure, easy to operate

 

Refractory material

Multi-layer insulation design, composed of lightweight alumina ceramic fiber and high-quality insulation board backing, does not contain asbestos components, low heat loss and low energy consumption

 

Heating system

High-quality SIC spiral resistance wire heating element is safely and firmly embedded on the surface of the furnace, and is heated by free heat radiation in the furnace cavity, which is energy-saving and efficient, and has a long service life

Ring heating by resistance wire to achieve good uniformity in the furnace

 

Temperature Control Panel

PID and SSR control mode, precise temperature control

Internationally standardized S-type nickel-chromium-silicon thermocouple with a temperature measurement range of 0-1400℃ and a long service life

The furnace door is equipped with a door-opening power-off safety protection switch

 

Program Controller

Advanced controllers that meet complex process requirements

Simple and direct operation, flexible programming

Programmable 4 curves, 8 program segments for a single curve

Over temperature and fault alarm, automatic safety protection

 

Vacuum Atmosphere Function

With 304 stainless steel sealing flange to obtain vacuum or atmosphere in the furnace tube

High-quality quartz glass working tube, and metal or corundum working tube can also be selected to adapt to different working conditions

The high-performance bipolar rotary vane vacuum pump can obtain a vacuum degree of 5pa, and the digital vacuum gauge can display the vacuum degree

With air circuit control unit, the control unit can choose 1-3 way MFC automatic control system


Specifications

Model

TF1400-25

TF1400-40

TF1400-60

TF1400-80

TF1400-100

TF1400-120

Tube Size

Φ25x800mm

Φ40x1000mm

Φ60x1000mm

Φ80x1000mm

Φ100x1000mm

Φ120x1000mm

Max Temperature

1400

Work Temperature

1300

Heating Zone

440mm

Voltage/Power

220V/2KW

220V/2KW

220V/3KW

220V/4KW

220V/5KW

220V/5KW

Heating Element

Silicon Carbide RodSICHeater

Chamber Material

Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration

Tube Material

Quartz Tube

Temperature Accuracy

±1

Thermocouple

S type thermocuple

Temperature Controller

Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; programmable 4 groups of 8 program segments, program heating, program heat preservation, program cooling

Heating Rate

1-25/min freely set

Furnace Structure

Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation

Sealing Function

Both ends of the furnace tube are equipped with stainless steel metal flanges, matched with high-temperature PTFE gaskets, which can work under vacuum with a vacuum degree of ≤5pa (rotary vane vacuum pump)

Atmosphere Performance

There are air inlets and outlets at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air intake and output, and can be fed with protective gases such as nitrogen, argon, and hydrogen.

Equipment Safety

Modular control, sound and light alarm signal will be sent out for over temperature and broken coupler in the working process, and the protection action will be completed automatically

Safety Protection

The equipment is equipped with a circuit breaker, which will automatically pop open in case of short circuit leakage, which can protect the safety of equipment and operators

Furnace Shell

High-quality cold-rolled steel plate CNC machine tool blanking processing, after welding, grinding, polishing, phosphating, pickling, surface electrostatic spraying plastic powder

Standard Accessroies

1. Furnace Body  2. Temperature Controller 3. Power Cable 3 meters  4.Thermocouple  5.Manual  6. Furnace Hook 7. One pair of high temperature gloves 8. Two pipe plugs  9. One set of sealing flange

Optional Accessories

1. Optional rotary vane vacuum pump (vacuum degree ≤ 5pa  2. Optional digital vacuum gauge (1.0×105-1.0×10-1pa)  3. Optional float flowmeter (range 60-600ml/min)  4. Optional with quartz boat



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+86 139 1299 5166

  • Email: chishun@126.com
  • Phone: +86 139 1299 5166
  • Address: NO.2 Ailing Road, Jiangning DisTrict, Nanjing
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